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[IEEE 2018 IEEE International Frequency Control Symposium (IFCS) - Olympic Valley, CA (2018.5.21-2018.5.24)] 2018 IEEE International Frequency Control Symposium (IFCS) - A 200-nm-gap Titanium Nitride Composite CMOS-MEMS CMUT for Biomedical Ultrasounds
Hsu, Tzu-Hsuan, Chen, Chao-Yu, Liu, Chun-You, Li, Ming-Huang, Li, Shenz-ShianYear:
2018
Language:
english
DOI:
10.1109/FCS.2018.8597500
File:
PDF, 1.44 MB
english, 2018