AlN/SiC MEMS for High-Temperature Applications

Esteves, Giovanni, Habermehl, Scott D., Clews, Peggy J., Fritch, Chanju, Griffin, Benjamin A.

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Year:

2019

Language:

english

Journal:

Journal of Microelectromechanical Systems

DOI:

10.1109/JMEMS.2019.2923919

File:

PDF, 1.47 MB

english, 2019

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