[IEEE CAS '99 Proceedings. 1999 International Semiconductor Conference - Sinaia, Romania (5-9 Oct. 1999)] CAS '99 Proceedings. 1999 International Semiconductor Conference (Cat. No.99TH8389) - TiO/sub 2/-MOCVD thin films on large area macroporous silicon for capacitor applications
Angelescu, A., Kleps, I., Battiston, G.A., Gerbasi, R., Samfirescu, N.Volume:
1
Year:
1999
Language:
english
DOI:
10.1109/smicnd.1999.810464
File:
PDF, 292 KB
english, 1999