![](/img/cover-not-exists.png)
Thermal Drift Investigation of an SOI-Based MEMS Capacitive Sensor with an Asymmetric Structure
Li, Haiwang, Zhai, Yanxin, Tao, Zhi, Gui, Yingxuan, Tan, XiaoVolume:
19
Language:
english
Journal:
Sensors
DOI:
10.3390/s19163522
Date:
August, 2019
File:
PDF, 12.00 MB
english, 2019