[IEEE 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Hangzhou (2018.8.13-2018.8.17)] 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - An Inertial Piezoelectric Hybrid Actuator With LargeAngular Velocity and High Resolution

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