Analytical modeling of n-type doped silicon elastic constants and frequency-compensation of Lamé mode microresonators
Rajai, Payman, Ahmed, Hasnet, Straeten, Matthew, Xereas, George, Ahamed, Mohammed JalalVolume:
297
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.07.032
Date:
October, 2019
File:
PDF, 2.26 MB
2019