The critical role of N-vacancy on chemical composition...

Journal of Applied Physics 2019 / 06 Vol. 125; Iss. 21

The critical role of N-vacancy on chemical composition fluctuations and degradation of InAlN layer

Mohamad, Ranim, Chauvat, Marie Pierre, Kret, Slawomir, Gamarra, Piero, Delage, Sylvain, Hounkpati, Viwanou, Lacam, Cedric, Chen, Jun, Ruterana, Pierre
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Volume:
125
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5088109
Date:
June, 2019
File:
PDF, 2.34 MB
2019
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