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Fabrication of ultrahigh-aspect-ratio and periodic silicon nanopillar arrays using dislocation lithography and DRIE
Ma, Zhibo, Guo, Tongxin, Cheng, Shaolei, Song, Zechen, Wang, Jiayan, Yuan, weizhengJournal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab3749
Date:
July, 2019
File:
PDF, 825 KB
2019