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Polymer-Induced Self-Assembly of a Three-Dimensional Mesoscale Structure
Kawai, Ryota, Mori, Yaoki, Suzuki, HiroakiVolume:
28
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2919230
Date:
August, 2019
File:
PDF, 2.10 MB
english, 2019