[IEEE 2019 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2019.3.18-2019.3.19)] 2019 China Semiconductor Technology International Conference (CSTIC) - Reactive-Ion Etching of Cr-Doped Sb 2 Te 3 Thin Film in SF 6 /O 2 Plasma for Non-Volatile Phase-Change Memories

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