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[IEEE 2019 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2019.3.18-2019.3.19)] 2019 China Semiconductor Technology International Conference (CSTIC) - Reactive-Ion Etching of Cr-Doped Sb 2 Te 3 Thin Film in SF 6 /O 2 Plasma for Non-Volatile Phase-Change Memories
Wang, Luguang, Wang, Fang, Li, Yuxiang, Huang, Jinrong, Li, Wei, Zhang, KailiangYear:
2019
Language:
english
DOI:
10.1109/cstic.2019.8755643
File:
PDF, 1.22 MB
english, 2019