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[IEEE 2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Hannover, Germany (2019.3.24-2019.3.27)] 2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Enhanced Fluid Flow by Wavelike Excitation of a Micromechanical Bending Actuator
Holzl, Wolfgang, Behlert, Regine, Gehring, Matthias, Schrag, GabrieleYear:
2019
Language:
english
DOI:
10.1109/eurosime.2019.8724585
File:
PDF, 8.12 MB
english, 2019