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[IEEE 2018 IEEE 2nd International Conference on Dielectrics (ICD) - Budapest (2018.7.1-2018.7.5)] 2018 IEEE 2nd International Conference on Dielectrics (ICD) - Effect of Flow Rate and Precursor Sublimation Temperature on the LPCVD Growth of Hexagonal Boron Nitride
Zhang, Dujiao, Meng, Guodong, Wang, Kejing, Gao, Xinyu, Dong, Chengye, Wu, Feihong, Cheng, YonghongYear:
2018
Language:
english
DOI:
10.1109/icd.2018.8468456
File:
PDF, 536 KB
english, 2018