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[IEEE 2019 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2019.3.31-2019.4.4)] 2019 IEEE International Reliability Physics Symposium (IRPS) - Experimental Study on Effects of Boron Transient Enhanced Diffusion on Channel Size Dependences of Low Frequency Noise in NMOSFETs
Fujii, Shuntaro, Maru, Isao, Morita, Soichi, Miyazaki, TsutomuYear:
2019
Language:
english
DOI:
10.1109/irps.2019.8720585
File:
PDF, 1017 KB
english, 2019