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[IEEE 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore (2018.4.22-2018.4.26)] 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Sensitivity Analysis of Micromachined Thermal Wind Sensor Based on Back Surface Sensing Mode
Wang, Zhenjun, Yi, Zhenxiang, Ye, Yizhou, Qin, Ming, Huang, Qing-AnYear:
2018
Language:
english
DOI:
10.1109/nems.2018.8556920
File:
PDF, 4.69 MB
english, 2018