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[IEEE 2019 International Seminar on Electron Devices Design and Production (SED) - Prague, Czech Republic (2019.4.23-2019.4.24)] 2019 International Seminar on Electron Devices Design and Production (SED) - Integral Microaccelerometer Based on GaAs/InAs
Rakhmatulin, A.Sh., Popov, V.D.Year:
2019
Language:
english
DOI:
10.1109/sed.2019.8798453
File:
PDF, 240 KB
english, 2019