![](/img/cover-not-exists.png)
A Novel Piezoelectrically Driven Miniature Proportional Pneumatic Control Valve Utilizing a Microfabricated Orifice Array
Hagstrom, Nathan P., Fikru, Nebiyu, Hargus, Alex M., Chase, Thomas R.Year:
2019
Language:
english
Journal:
IEEE/ASME Transactions on Mechatronics
DOI:
10.1109/tmech.2019.2934405
File:
PDF, 8.61 MB
english, 2019