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Contraction of Microwave Discharge in the Reactor for Chemical Vapor Deposition of Diamond
Bogdanov, S. A., Gorbachev, A. M., Radishev, D. B., Vikharev, A. L., Lobaev, M. A.Volume:
45
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785019020032
Date:
February, 2019
File:
PDF, 482 KB
english, 2019