The effect of stress state on AlN thin films and...

Journal of Materials Science: Materials in Electronics 2019 / 8 Vol. 30; Iss. 15

The effect of stress state on AlN thin films and AlN/Finemet magnetoelectric composite device

Yin, Liping, Hu, Wenlong, Wu, Ming, Shi, Jiaxing, Zhu, Jie
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Volume:
30
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-019-01772-5
Date:
August, 2019
File:
PDF, 903 KB
english, 2019
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