Formation and investigation of plasma nanostructured hafnia coatings
Savushkina, S V, Polyansky, M N, Vysotina, E A, Ashmarin, A A, Panasova, G V, Agureev, L EVolume:
1238
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1238/1/012035
Date:
June, 2019
File:
PDF, 1.10 MB
english, 2019