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Synthesis of α-Al 2 O 3 coatings by reactive anodic arc evaporation under high-density low-energy ion assistance
Gavrilov, N V, Kamenetskikh, A S, Tretnikov, P V, Chukin, A VVolume:
1281
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1281/1/012020
Date:
July, 2019
File:
PDF, 856 KB
english, 2019