Etching of GaN layers at electrolysis under UV-irradiation

Journal of Physics Conference Series 2016 / 08 Vol. 741

Etching of GaN layers at electrolysis under UV-irradiation

Zubenko, T K, Puzyk, M V, Stozharov, V M, Ermakov, I A, Kovalev, D S, Ivanova, S A, Usikov, A S, Medvedev, O S, Papchenko, B P, Kurin, S Yu, Antipov, A A, Chernyakov, A E
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Volume:
741
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/741/1/012050
Date:
August, 2016
File:
PDF, 1.46 MB
english, 2016
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