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Metrological characterization of nm-range dynamic etalons using a heterodyne interferometer
Kazieva, T V, Kuznetsov, A P, Ponarina, M V, Gubskiy, K L, Reshetov, V NVolume:
747
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/747/1/012059
Date:
September, 2016
File:
PDF, 1.33 MB
english, 2016