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[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Optical profilometry and AFM measurements comparison on low amplitude deterministic surfaces
Beitia, C., Abdel sater, M., Cordeau, M., Godny, S., Petitgrand, S., Alliata, D.Year:
2019
Language:
english
DOI:
10.1109/ASMC.2019.8791802
File:
PDF, 1.01 MB
english, 2019