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[IEEE 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Singapore, Singapore (2019.3.12-2019.3.15)] 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Effect of Polysilicon Grain Size on Gate Leakage in CMOS Manufacturing
Kong, Q. Y., Taher, C., Bong, B. N., Wang, H. R., Qi, Y., Mook, H. W., Tham, W. H., Kuan, H. P.Year:
2019
Language:
english
DOI:
10.1109/EDTM.2019.8731028
File:
PDF, 236 KB
english, 2019