Design Rules for TSV membranes
Coppeta, Raffaele A., Zisser, Wolfhard H., Singulani, Anderson, Parteder, Georg, Kraft, JochenYear:
2019
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/TDMR.2019.2923669
File:
PDF, 832 KB
english, 2019