[IEEE 2019 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2019.3.18-2019.3.19)] 2019 China Semiconductor Technology International Conference (CSTIC) - Inductive Coupled Downstream Plasma CD Trim Process Stability Study
Fu, Yali, Ma, Shawming, Wang, Yi, Sui, Linda, Chen, Lu, Vaniapura, Vijay, Diao, Li, Jiao, Mingjie, Chen, HongweiYear:
2019
Language:
english
DOI:
10.1109/cstic.2019.8755658
File:
PDF, 1.91 MB
english, 2019