[IEEE 2019 Electron Devices Technology and Manufacturing...

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[IEEE 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Singapore, Singapore (2019.3.12-2019.3.15)] 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - High Performance Full Chip Device Profiling and DOE selection for Physical and Parametric Yield Monitoring

Lai, Ya-Chieh, Salem, Rami, Pinto, Angelo, Cote, Michel, Xu, Wei, Pathak, Piyush, Hurat, Philippe
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Year:
2019
Language:
english
DOI:
10.1109/edtm.2019.8731156
File:
PDF, 122 KB
english, 2019
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