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[IEEE 2019 International Seminar on Electron Devices Design and Production (SED) - Prague, Czech Republic (2019.4.23-2019.4.24)] 2019 International Seminar on Electron Devices Design and Production (SED) - Application of the Selective Silicon Etching Methods for Estimation of the Wafers Quality in the Micromechanical Sensors
Abdullin, Farkhad A., Pautkin, Valeriy E., Pecherskaya, Ekaterina A., Pecherskiy, Anatoliy V., Artamonov, Dmitriy V., Nikolaev, Kirill O.Year:
2019
Language:
english
DOI:
10.1109/sed.2019.8798467
File:
PDF, 798 KB
english, 2019