New Semipolar Aluminum Nitride Thin Films: Growth...

New Semipolar Aluminum Nitride Thin Films: Growth Mechanisms, Structure, Dielectric and Pyroelectric Properties

Sergeeva, O. N., Solnyshkin, A. V., Kukushkin, S. A., Osipov, A. V., Sharofidinov, Sh., Kaptelov, E. Yu., Senkevich, S. V., Pronin, I. P.
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Volume:
544
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150193.2019.1598181
Date:
May, 2019
File:
PDF, 948 KB
english, 2019
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