Bottom Oxide Bulk FinFETs Without Punch-Through-Stopper for Extending Toward 5-nm Node
Yoon, Jun-Sik, Jeong, Jinsu, Lee, Seunghwan, Baek, Rock-HyunVolume:
7
Year:
2019
Language:
english
Journal:
IEEE Access
DOI:
10.1109/access.2019.2920902
File:
PDF, 4.24 MB
english, 2019