Effect of Composition, Interface, and Deposition Sequence...

Nanoscale Research Letters 2019 / 12 Vol. 14; Iss. 1

Effect of Composition, Interface, and Deposition Sequence on Electrical Properties of Nanolayered Ta2O5-Al2O3 Films Grown on Silicon by Atomic Layer Deposition

Li, Junpeng, Wu, Jianzhuo, Liu, Junqing, Sun, Jiaming
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Volume:
14
Language:
english
Journal:
Nanoscale Research Letters
DOI:
10.1186/s11671-019-2907-0
Date:
December, 2019
File:
PDF, 1.08 MB
english, 2019
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