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High-Performance a-InGaZnO Thin-Film Transistors with Extremely Low Thermal Budget by Using a Hydrogen-Rich Al2O3 Dielectric
Shao, Yan, Wu, Xiaohan, Zhang, Mei-Na, Liu, Wen-Jun, Ding, Shi-JinVolume:
14
Language:
english
Journal:
Nanoscale Research Letters
DOI:
10.1186/s11671-019-2959-1
Date:
December, 2019
File:
PDF, 1.43 MB
english, 2019