Evaluation of ion/electron beam induced deposition for...

Applied Microscopy 2019 / 12 Vol. 49; Iss. 1

Evaluation of ion/electron beam induced deposition for electrical connection using a modern focused ion beam system

An, Byeong-Seon, Kwon, Yena, Oh, Jin-Su, Shin, Yeon-Ju, Ju, Jae-seon, Yang, Cheol-Woong
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Volume:
49
Language:
english
Journal:
Applied Microscopy
DOI:
10.1186/s42649-019-0008-2
Date:
December, 2019
File:
PDF, 1.53 MB
english, 2019
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