An optimization framework for the design of piezoelectric AFM cantilevers
Moore, Steven Ian, Ruppert, Michael G., Yong, Yuen KuanVolume:
60
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2019.08.005
Date:
November, 2019
File:
PDF, 7.28 MB
english, 2019