Direct synthesis of ultrathin SOI structure by extremely...

AIP Advances 2016 / 06 Vol. 6; Iss. 6

Direct synthesis of ultrathin SOI structure by extremely low-energy oxygen implantation

Hoshino, Yasushi, Yachida, Gosuke, Inoue, Kodai, Toyohara, Taiga, Nakata, Jyoji
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Volume:
6
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4954200
Date:
June, 2016
File:
PDF, 6.67 MB
english, 2016
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