Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures
Medvedev, R. V., Nikolaev, K. V., Zameshin, A. A., IJpes, D., Makhotkin, I. A., Yakunin, S. N., Yakshin, A. E., Bijkerk, F.Volume:
126
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5097378
Date:
July, 2019
File:
PDF, 3.64 MB
english, 2019