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8th European Conference on Chemical Vapor Deposition
Agüero, Adam, Lux, Benno, Norman, John, Choy, K. L., Stuke, Michael, Teyssandier, F., Halvarsson, M.R., Brennfleck, K., Blocher, JohnVolume:
7
Language:
english
Journal:
Materials and Processing Report
DOI:
10.1080/08871949.1992.11752479
Date:
January, 1992
File:
PDF, 1.81 MB
english, 1992