8th European Conference on Chemical Vapor Deposition

8th European Conference on Chemical Vapor Deposition

Agüero, Adam, Lux, Benno, Norman, John, Choy, K. L., Stuke, Michael, Teyssandier, F., Halvarsson, M.R., Brennfleck, K., Blocher, John
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Volume:
7
Language:
english
Journal:
Materials and Processing Report
DOI:
10.1080/08871949.1992.11752479
Date:
January, 1992
File:
PDF, 1.81 MB
english, 1992
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