The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials
Sun, Jing-Yu, Wen, De-Qi, Zhang, Quan-Zhi, Liu, Yong-Xin, Wang, You-NianVolume:
26
Journal:
Physics of Plasmas
DOI:
10.1063/1.5094100
Date:
June, 2019
File:
PDF, 10.84 MB
2019