Method of Processing Quartz Accessories in the...

Method of Processing Quartz Accessories in the Manufacturing of the Structures of Micro- and Nanoelectronics

Ismailov, T. A., Sarkarov, T. É., Shakhmaeva, A. R., Shangereeva, B. A.
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Volume:
75
Journal:
Glass and Ceramics
DOI:
10.1007/s10717-019-00118-1
Date:
March, 2019
File:
PDF, 78 KB
2019
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