![](/img/cover-not-exists.png)
Method of Processing Quartz Accessories in the Manufacturing of the Structures of Micro- and Nanoelectronics
Ismailov, T. A., Sarkarov, T. É., Shakhmaeva, A. R., Shangereeva, B. A.Volume:
75
Journal:
Glass and Ceramics
DOI:
10.1007/s10717-019-00118-1
Date:
March, 2019
File:
PDF, 78 KB
2019