[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Mid-low energy implantation tilt angle monitoring with photomodulated reflectance measurement
Ujhelyi, F., Pongracz, A., Kun, A., Szivos, J., Bartal, B., Fodor, B., Bolcskei-Molnar, A., Nadudvari, Gy., Byrnes, J., Rubin, Leonard M.Year:
2019
DOI:
10.1109/ASMC.2019.8791776
File:
PDF, 1.13 MB
2019