[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Controlling TC SAW Filter Frequency with Picosecond Ultrasonics
Kim, SU, Kim, DS, Lee, KU, Park, KS, Han, YT, Kim, C., Dai, J., Mukundhan, P.Year:
2019
Language:
english
DOI:
10.1109/ASMC.2019.8791753
File:
PDF, 1.01 MB
english, 2019