[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Early Testable Addressable Logic (ETAL) Test Structure: Showcasing the use of an Alternate Logic Yield Learning Test Structure for Technology Development
Ahsan, Ishtiaq, Greenslit, Daniel, Evans, Bill, Laaksonen, Toni, Gordon, Tarl, Song, Zhigang, Liu, Yandong, Masnik, John, Barth, Frank, Khan, Shahrukh, Winkler, Joerg, Sekar, Kannan, Bawaskar, Neerja,Year:
2019
Language:
english
DOI:
10.1109/asmc.2019.8791769
File:
PDF, 3.26 MB
english, 2019