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Elastohydrodynamics of roll-to-roll UV-cure imprint lithography
Cochrane, Andrew, Tjiptowidjojo, Kristianto, Bonnecaze, Roger T., Schunk, Peter RandallJournal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/acs.iecr.9b03160
Date:
August, 2019
File:
PDF, 3.69 MB
2019