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Absolutely calibrated EUV spectra of Xe laser plasma radiation for lithography needs
Butorin, P S, Kalmykov, S G, Sasin, M EVolume:
1135
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1135/1/012086
Date:
December, 2018
File:
PDF, 761 KB
2018