Design, fabrication and characterization of high temperature thin film heat flux sensors
Zhang, Congchun, Huang, Jianze, Li, Juan, Yang, Shenyong, Ding, Guifu, Dong, WeiLanguage:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111128
Date:
August, 2019
File:
PDF, 1.27 MB
english, 2019