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Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography
Park, Gyujin, Lee, ChangheeVolume:
9
Language:
english
Journal:
Applied Sciences
DOI:
10.3390/app9153100
Date:
July, 2019
File:
PDF, 7.08 MB
english, 2019