The effect of substrate temperature on the properties of...

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The International Journal of Advanced Manufacturing Technology 2019 / 8

The effect of substrate temperature on the properties of (AlCrNbSiTiV)N films deposited by HIPIMS

Liu, Zhi-wei, Hsu, Chun-Yao, Wu, Ming-Chang, Tsao, Chung-Chen
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Language:
english
Journal:
The International Journal of Advanced Manufacturing Technology
DOI:
10.1007/s00170-019-04251-7
Date:
August, 2019
File:
PDF, 1.57 MB
english, 2019
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