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Precise shape nano-replication for an antireflective imaging lens using a mould with a thermal insulation layer
Kurihara, Kazuma, Hokari, Ryohei, Ootsu, Nobuyuki, Narita, Motoyuki, Miyake, KojiVolume:
217
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111106
Date:
September, 2019
File:
PDF, 1.42 MB
english, 2019