Comparative studies of compact kHz and MHz driven low...

Comparative studies of compact kHz and MHz driven low pressure plasmas by emission and laser spectroscopy

Mitic, S., Kaupe, J., Riedl, P., Coenen, D.
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Volume:
26
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.5092579
Date:
July, 2019
File:
PDF, 3.20 MB
english, 2019
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