[IEEE 2018 International Integrated Reliability Workshop (IIRW) - South Lake Tahoe, CA, USA (2018.10.7-2018.10.11)] 2018 International Integrated Reliability Workshop (IIRW) - Correlated Defect Creation in HfO 2 films
Strand, Jack, Shluger, AlexanderYear:
2018
Language:
english
DOI:
10.1109/IIRW.2018.8727085
File:
PDF, 163 KB
english, 2018